JPS6342157U - - Google Patents
Info
- Publication number
- JPS6342157U JPS6342157U JP13752086U JP13752086U JPS6342157U JP S6342157 U JPS6342157 U JP S6342157U JP 13752086 U JP13752086 U JP 13752086U JP 13752086 U JP13752086 U JP 13752086U JP S6342157 U JPS6342157 U JP S6342157U
- Authority
- JP
- Japan
- Prior art keywords
- target
- planar magnetron
- magnetron cathode
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims 2
- 238000001755 magnetron sputter deposition Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 239000013077 target material Substances 0.000 description 4
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13752086U JPS6342157U (en]) | 1986-09-08 | 1986-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13752086U JPS6342157U (en]) | 1986-09-08 | 1986-09-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6342157U true JPS6342157U (en]) | 1988-03-19 |
Family
ID=31041652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13752086U Pending JPS6342157U (en]) | 1986-09-08 | 1986-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6342157U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63307265A (ja) * | 1987-06-04 | 1988-12-14 | Toshiba Corp | スパッタリング・タ−ゲット |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS588768U (ja) * | 1981-07-10 | 1983-01-20 | セイコー精機株式会社 | 気体圧縮機 |
-
1986
- 1986-09-08 JP JP13752086U patent/JPS6342157U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS588768U (ja) * | 1981-07-10 | 1983-01-20 | セイコー精機株式会社 | 気体圧縮機 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63307265A (ja) * | 1987-06-04 | 1988-12-14 | Toshiba Corp | スパッタリング・タ−ゲット |